Sugai, Keiji: search on Z-Library

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1

Electrostatic Coupling of Antenna and the Shielding Effect in Inductive RF Plasmas

Sugai, Hideo, Nakamura, Kenji, Suzuki, Keiji

Journal:

Japanese Journal of Applied Physics

Year:

1994

File:

PDF, 788 KB

1994

2

Hot Spots and Electron Heating Processes in a Helicon-Wave Excited Plasma

Nakamura, Keiji, Suzuki, Keiji, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1995

File:

PDF, 1.17 MB

1995

3

Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons

Guo, Ying, Nakamura, Keiji, Zhang, Jing, Nakano, Yoshitaka, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 393 KB

english, 2011

4

Photon-enhanced secondary electron emission at target in plasma immersion ion implantation

Keiji Nakamura, Masaki Ando, Hideo Sugai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2003

Language:

english

File:

PDF, 175 KB

english, 2003

5

Measurement of secondary electron emission coefficient of plane target in plasma immersion ion implantation

Keiji Nakamura, Masaki Ando, Hideo Sugai

Journal:

Electrical Engineering in Japan

Year:

2005

Language:

english

File:

PDF, 1.29 MB

english, 2005

6

Biocatalyst-Mediated Efficient Preparation of Highly Enantiomerically Enriched ( R )-5-Hexanolide

Sugai, Takeshi, Hamada, Keiji, Akeboshi, Tomohiro, Ikeda, Hajime, Ohta, Hiromichi

Journal:

Year:

1997

File:

PDF, 258 KB

1997

7

Recent Innovations in Microwave Probes for Reactive Plasma Diagnostics

Sugai, Hideo, NAKAMURA, Keiji

Journal:

Japanese Journal of Applied Physics

Year:

2019

Language:

english

File:

PDF, 6.07 MB

english, 2019

8

Comparison of the sequencing bias of currently available library preparation kits for Illumina sequencing of bacterial genomes and metagenomes

Sato, Mitsuhiko P, Ogura, Yoshitoshi, Nakamura, Keiji, Nishida, Ruriko, Gotoh, Yasuhiro, Hayashi, Masahiro, Hisatsune, Junzo, Sugai, Motoyuki, Takehiko, Itoh, Hayashi, Tetsuya

Journal:

Year:

2019

Language:

english

File:

PDF, 539 KB

english, 2019

9

Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance

Liang, Yizi, Kato, Kimitaka, Nakamura, Keiji, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 477 KB

english, 2011

10

Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas

Pandey, Anil, Nakamura, Keiji, Sugai, Hideo

Journal:

Applied Physics Express

Year:

2013

Language:

english

File:

PDF, 1.41 MB

english, 2013

11

Energy measurements of sheath-accelerated secondary electrons in plasma immersion ion implantation

Keiji Nakamura, Mitsuaki Tanaka, Hideo Sugai

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 218 KB

english, 2003

12

In situ monitoring of GaN substrate surface in ICP containing energetic electrons

Huang, Xiaojiang, Guo, Ying, Zhang, Jing, Nakano, Yoshitaka, Sugai, Hideo, Nakamura, Keiji

Journal:

Applied Surface Science

Year:

2014

Language:

english

File:

PDF, 579 KB

english, 2014

13

High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma

Nakamura, Keiji, Imura, Tomonori, Sugai, Hideo, Ohkubo, Michiko, Ichihara, Katsutaro

Journal:

Japanese Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 291 KB

english, 1994

14

In situ Probe of GaN Film Surfaces under Plasma Conditions by Photoluminescence Technique

Chen, Miao-Gen, Nakamura, Keiji, Nakano, Yoshitaka, Zhang, Gao-Hui, Sugai, Hideo

Journal:

Applied Physics Express

Year:

2012

Language:

english

File:

PDF, 1.26 MB

english, 2012

15

Microwave plasma generation by the fast rotation and slow pulsation of resonant fields in a cylindrical cavity

Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 1.62 MB

english, 2017

16

Generation of slowly rotating microwave plasma by amplitude-modulated resonant cavity

Hotta, Masaya, Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 1.70 MB

english, 2017

17

New Inductive rf Discharge Using an Internal Metal Antenna

Nakamura, Keiji, Kuwashita, Yukiyasu, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1995

File:

PDF, 598 KB

1995

18

Cross Section Measurements for Electron-Impact Dissociation of C H F 3 into Neutral and Ionic Radicals

Goto, Masashi, Nakamura, Keiji, Toyoda, Hirotaka, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1994

File:

PDF, 1013 KB

1994

19

Real-time curling probe monitoring of dielectric layer deposited on plasma chamber wall

Hotta, Masaya, Ogawa, Daisuke, Nakamura, Keiji, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 2.11 MB

english, 2018

20

Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma

Kokura, Hikaru, Yoneda, Shinichi, Nakamura, Keiji, Mitsuhira, Noriyuki, Nakamura, Moritaka, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 458 KB

english, 1999

21

In-situ photoluminescence monitoring of GaN in plasma exposure

Chen, Miao-Gen, Nakamura, Keiji, Nakano, Yoshitaka, Yu, Sen-Jiang, Sugai, Hideo

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 820 KB

english, 2012

22

Stabilization of Oxygen Diffusion in Ga-Doped YBa2Cu3O7-δ Thin Films Observed by Spectroscopic Ellipsometry

Sugai, Satoshi, Matsukawa, Yasunari, Shimosato, Keiji, Oda, Shunri

Journal:

Japanese Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 285 KB

english, 2000

23

In situ process monitoring in plasma immersion ion implantation based on measurements of secondary electron emission coefficient

Keiji Nakamura, Mitsuaki Tanaka, Hideo Sugai

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 373 KB

english, 2002

24

Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas

Liang, Iji, Nakamura, Keiji, Sugai, Hideo

Journal:

Applied Physics Express

Year:

2011

Language:

english

File:

PDF, 2.04 MB

english, 2011

25

[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Plasma density measurements in agressive etching gas environment

Ganachev, Ivan P., Nakamura, Keiji, Sugai, Hideo

Year:

2008

Language:

english

File:

PDF, 35 KB

english, 2008

26

Impedance Evaluation of Hydrogen Sensor Using Ultrathin Platinum Film

Takeichi, Shuzo, Ushita, Yuki, Sugai, Ryosuke, Sakai, Kenji, Kiwa, Toshihiko, Tsukada, Keiji

Journal:

Transactions of the Materials Research Society of Japan

Year:

2015

Language:

english

File:

PDF, 1.10 MB

english, 2015

27

Curling probe measurement of electron density in pulse-modulated plasma

Pandey, Anil, Sakakibara, Wataru, Matsuoka, Hiroyuki, Nakamura, Keiji, Sugai, Hideo

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 2.05 MB

english, 2014

28

Time-resolved curling-probe measurements of electron density in high frequency pulsed DC discharges

Pandey, Anil, Sakakibara, Wataru, Matsuoka, Hiroyuki, Nakamura, Keiji, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 2.52 MB

english, 2016

29

Direct measurements of sheath-accelerated secondary electrons for monitoring the incident ion flux in plasma immersion ion implantation

Nakamura, Keiji, Tanaka, Mitsuaki, Sugai, Hideo

Journal:

Plasma Sources Science and Technology

Year:

2002

Language:

english

File:

PDF, 124 KB

english, 2002

30

Radical Control by Wall Heating of a Fluorocarbon Etching Reactor

Ito, Satoshi, Nakamura, Keiji, Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1994

File:

PDF, 791 KB

1994

31

Significant enhancement of ion-induced secondary electron current by photons in plasma immersion ion implantation

Keiji Nakamura, Hideo Sugai

Journal:

Surface and Coatings Technology

Year:

2005

Language:

english

File:

PDF, 122 KB

english, 2005

32

Maternally inherited diabetes and deafness complicated by mesangial galactose-deficient IgA1 deposits: a case report

Sugai, Keiji, Ueda, Hiroyuki, Morimoto, Keita, Tanaka, Mai, Takahashi, Daisuke, Nakashima, Akio, Kato, Junichiro, Takahashi, Hiroshi, Yamaguchi, Yutaka, Kawamura, Tetsuya, Hanaoka, Kazushige, Miyazaki

Journal:

Year:

2018

Language:

english

File:

PDF, 1.72 MB

english, 2018

33

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

Kokura, Hikaru, Nakamura, Keiji, Ghanashev, Ivan P., Sugai, Hideo

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 367 KB

english, 1999

34

A New Synthetic Method for Cyclic Allenes and Acetylenes. Cleavage of a C-C Bond Directed by a Silyl Group

Sugai, Masaharu, Tanino, Keiji, Kuwajima, Isao

Journal:

Year:

1997

File:

PDF, 117 KB

1997

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